Везде

RAS PhysicsПоверхность. Рентгеновские, синхротронные и нейтронные исследования Journal of Surface Investigation. X-Ray, Synchrotron and Neutron Techniques

  • ISSN (Print) 1028-0960
  • ISSN (Online) 3034-5731

Mechanisms of Methyl Group Elimination from Low-k Dielectric Surfaces by Plasma of Various Composition

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PII
S30345731S1028096025020054-1
DOI
10.7868/S3034573125020054
Publication type
Article
Status
Published
Authors
A.A. Sycheva
  • Affiliation: Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University
A.A. Solovykh
  • Affiliation:
    Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University
    Lomonosov Moscow State University
E.N. Voronina
  • Affiliation:
    Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University
    Lomonosov Moscow State University
Volume/ Edition
Volume / Issue number 2
Pages
32-45
Abstract
Low-k dielectrics are applied as interlayer isolators between metallic (cuprum) interconnects in very large integrated circuits. Diffusion of Cu atoms can lead to their degradation, and the most efficient way to solve this problem is the fabrication of ultra-thin metal barrier layers. However, this process is complicated by the non-flatness of low-k surface and the presence of hydrophobic CH-groups preventing the metal deposition. Therefore, before the barrier coating it is necessary to perform preliminary surface fuctionalization aimed at removing methyl groups. In this work the dynamic density functional theory-based simulation of radical and ion irradiation of low-k surface for plasma of various composition (noble gases, molecular nitrogen and oxygen) was carried out to study the mechanisms of methyl group removal. The results obtained showed the possibility of this process for low-energy range (10-15 eV) of incident particles. In this work the detailed analysis of the calculated trajectories is presented, the interactions of CH-groups with noble gas atoms (Ne, He) and with more chemically active N and O atoms were compared, the peculiarities of methyl group removal under molecule and molecular ion irradiation were described.
Keywords
low-k материалы плазма ионы радикалы функционализация поверхности компьютерное моделирование метод теории функционала плотности
Date of publication
22.08.2024
Year of publication
2024
Number of purchasers
0
Views
43

References

  1. 1. Baklanov M.R., Ho P.S., Zschech E. Advanced Interconnects for ULSI Technology. Wiley & Sons, 2012. 596 p.
  2. 2. Jenkins M., Austin D.Z., Conley J.F., Fan J., de Groot C.H., Jiang L., Fan Ye, Ali R., Ghosh G., Orlowski M. // ECS J. Solid State Sci. Technol. 2019. V. 8. P. 159. https://www.doi.org/10.1149/2.0161910jss
  3. 3. Volksen W., Miller R.D., Dubois G. // Chem. Rev. 2010. V. 110. P. 56. https://www.doi.org/10.1021/cr9002819
  4. 4. Baklanov M.R., de Marneffe J.-F., Shamiryan D., Urbanowicz A.M., Shi H., Rakhimova T.V., Huang H., Ho P.S. // J. Appl. Phys. 2013. V. 113. P. 041101. https://www.doi.org/10.1063/1.4765297
  5. 5. Rakhimova T.V., Lopaev D.V., Mankelevich Yu.A., Kurchikov K.A., Zyryanov S.M., Palov A.P., Proshina O.V., Maslakov K.I., Baklanov M.R. // J. Phys. D. 2015. V. 48. P. 175204. https://www.doi.org/10.1088/0022-3727/48/17/175204
  6. 6. Braginsky O.V., Kovalev A.S., Lopaev D.V., Malykhin E.M., Mankelevich Yu.A., Rakhimova T.V., Rakhimov A.T., Vasilieva A.N., Zyryanov S.M., Baklanov M.R. // J. Appl. Phys. 2010. V. 108. P. 073303. https://www.doi.org/10.1063/1.3486084
  7. 7. Yamamoto H., Takeda K., Ishikawa K., Ito M., Sekine M., Hori M., Kaminatsui T., Hayashi H., Sakai I., Ohiwa T. // J. Appl. Phys. 2011. V. 109. P. 084112. https://www.doi.org/10.1063/1.3562161
  8. 8. Matsunaga N., Okumura H., Jinnai B., Samukawa S. // Jpn. J. Appl. Phys. 2010. V. 49. https://www.doi.org/10.1143/JJAP.49.04DB06
  9. 9. Kunnen E., Baklanov M.R., Franquet A., Shamiryan D., Rakhimova T.V., Urbanowicz A.M., Struyf H., Boullart W. // J. Vac. Sci. Technol. B. 2010. V. 28. № 3. P. 450. https://www.doi.org/10.1116/1.3372838
  10. 10. Sycheva A.A., Voronina E.N., Rakhimova T.V., Rakhimov A.T. // Appl. Surf. Sci. 2019. V. 475. P. 1021. https://www.doi.org/10.1016/j.apsusc.2019.01.078
  11. 11. Xu H., Hu Zh.-J., Qu X.-P., Wan H., Yan Sh.-S., Li M., Chen Sh.-M., Zhao Y.-H., Zhang J., Baklanov M.R. // Appl. Surf. Sci. 2019. V. 498. P. 143887. https://www.doi.org/10.1016/j.apsusc.2019.143887
  12. 12. Lionti K., Volksen W., Magbitang T., Darnon M., Dubois G. // ECS J. Solid State Sci. Technol. 2014. V. 4. P. 3071. https://www.doi.org/10.1149/2.0081501jss
  13. 13. Walton S.G., Hernández S.C., Boris D.R., Petrova Tz.B., Petrov G.M. // J. Phys. D: Appl. Phys. 2017. V. 50. P. 354001. https://www.doi.org/10.1088/1361-6463/aa7d12
  14. 14. Palov A.P., Proshina O.V., Rakhimova T.V., Rakhimov A.T., Voronina E.N. // Plasma Process. Polym. 2021. V. 18. P. 2100007. https://www.doi.org/10.1002/ppap.202100007
  15. 15. Voronina E.N., Sycheva A.A., Solovykh A.A., Proshina O.V., Rakhimova T.V., Palov A.P., Rakhimov A.T. // J. Vac. Sci. Technol. B. 2022. V. 40. P. 062203. https://www.doi.org/10.1116/6.0002006
  16. 16. Jensen F.Introduction to Computational Chemistry. Wiley & Sons, 2007. 620. p.
  17. 17. Кон В., Попл Дж.А. // Усп. физ. наук. 2002. Т. 172. С. 335. https://www.doi.org/10.3367/UFNr.0172.200203d.0335
  18. 18. Rakhimova T.V., Braginsky O.V., Ivanov V.V., Kovalev A.S., Lopaev D.V., Mankelevich Yu.A. // IEEE Trans. Plasma Sci. 2007. V. 35. P. 1229. https://www.doi.org/10.1109/TPS.2007.905201
  19. 19. Kovalev A.S., Kurchikov K.A., Proshina O.V., Rakhimova T.V., Vasilieva A.N., Voloshin D.G. // Phys. Plasmas. 2019. V. 26. P. 123501. https://www.doi.org/10.1063/1.5123989
  20. 20. Kresse G., Joubert D. // Phys. Rev. B. 1999. V. 59. P. 1758. https://www.doi.org/10.1103/PhysRevB.59.1758
  21. 21. Perdew J.P., Ruzsinszky A., Tao J. // J. Chem. Phys. 2005. V. 123. P. 062201. https://www.doi.org/10.1063/1.1904565
  22. 22. Kresse G., Furthmüller J. // Phys. Rev. B. 1996. V. 54. P. 11169. https://www.doi.org/10.1103/PhysRevB.54.11169
  23. 23. Blöchl P.E. // Phys. Rev. B. 1994. V. 50. P. 17953. https://www.doi.org/10.1103/PhysRevB.50.17953
  24. 24. Chaudhari M., Du J. // J. Vac. Sci. Technol. A. 2011. V. 29. P. 031303. https://www.doi.org/10.1116/1.3568963
  25. 25. Rimsza J.M., Kelber J.A., Du J. // J. Phys. D: Appl. Phys. 2014. V. 47. P. 335204. https://www.doi.org/10.1088/0022-3727/47/33/335204
  26. 26. Kazi H., Rimsza J., Du J. // J. Vac. Sci. Technol. A. 2014. V. 32. P. 051301. https://www.doi.org/10.1116/1.4890119
  27. 27. Соловых А.А., Сычева А.А., Воронина Е.Н. // Письма в ЖТФ. 2022. Т. 48. С. 19. https://www.doi.org/10.21883/PJTF.2022.07.52286.19085
  28. 28. Voevodin V.V., Antonov A.S., Nikitenko D.A., Shvets P.A., Sobolev S.I., Sidorov I.Yu., Stefanov K.S., Voevodin V.V., Zhumatiy S.A. // Supercomput. Front. Innovations. 2019. V. 6. P. 4. https://www.doi.org/10.14529/jsfi190201
  29. 29. Humphrey W., Dalke A., Schulten K. // J. Mol. Graphics. 1996. V. 14. P. 33. https://www.doi.org/10.1016/0263-7855 (96)00018-5
  30. 30. Darwent B. // Nat. Stand. Ref. Data Ser. NSRDS-NBS 31. Nat. Bur. Stand. 1970. P. 52. https://www.doi.org/10.6028/NBS.NSRDS.31
  31. 31. Соловых А.А., Сычева А.А., Воронина Е.Н. // Поверхность. Рентген., синхротр. и нейтрон. исслед. 2023. № 2. С. 63. https://www.doi.org/10.1134/S1027451023010391
  32. 32. Ландау Л.Д., Лифшиц Е.М. Теоретическая физика: Т. 1. Механика. М.: Наука. 1988, 224. с.
  33. 33. Balucani N. // Chem. Soc. Rev. 2012. V. 41. Iss. 16. P. 5473. https://www.doi.org/10.1039/c2cs35113g
  34. 34. Voronina E.N., Mankelevich Yu.A., Rakhimova T.V., Lopaev D.V. // J. Vacuum Sci. Technol. A. 2019. V. 37. Iss. 6. P. 061304. https://www.doi.org/10.1116/1.5122655
  35. 35. Balucani N., Bergeat A., Cartechini L., Volpi G.G., Casavecchia P., Skouteris D., Rosi M. // J. Phys. Chem. A. 2009. V. 113. Iss. 42. P. 11138. https://www.doi.org/10.1021/jp904302g
  36. 36. Lopaev D.V., Zyryanov S.M., Zotovich A.I., Rakhimova T.V., Mankelevich Yu.A., Voronina E.N. // J. Physics D. Appl. Phys. 2020. V. 53. P. 175203. https://www.doi.org/10.1088/1361-6463/ab6e99
  37. 37. Tait K.S., Kolb C.E., Baum H.R. // J. Chem. Phys. 1973. V. 59. Iss. 6. P. 3128. https://www.doi.org/10.1063/1.1680454
  38. 38. Герцберг Г. Спектры и строение двухатомных молекул. Москва: Изд-во иностр. лит. 1949. 404. с.
  39. 39. Sadeghi N., Foissac C., Supiot P. // J. Phys. D Appl. Phys. 2001. V. 34. P. 1779. https://www.doi.org/10.1088/0022-3727/34/12/304
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