RAS PhysicsПоверхность. Рентгеновские, синхротронные и нейтронные исследования Journal of Surface Investigation. X-Ray, Synchrotron and Neutron Techniques

  • ISSN (Print) 1028-0960
  • ISSN (Online) 3034-5731

Synthesis of Thin Films of NiO [111] on c-AlO Substrates by Pulsed Laser Deposition

PII
S3034573125090164-1
DOI
10.7868/S3034573125090164
Publication type
Article
Status
Published
Authors
Volume/ Edition
Volume / Issue number 9
Pages
122-126
Abstract
Thin NiO films with thickness from 40 to 170 nm were obtained by pulsed laser deposition on c-AlO substrates using the second harmonic of YAG:Nd- laser for ablation of a metal Ni target in a vacuum chamber at an oxygen pressure of 7.5 mTorr and substrate temperature of 370°C. Using X-ray diffraction, all NiO films were shown to have high crystalline perfection and the [111] orientation. The surface roughness of the obtained films is in the range from 1.6 to 2.3 nm. It was found that with increase in NiO film thickness, the charge carrier concentration decreased and the specific resistance increased. According to measurements of the optical properties of the films, the band gap increases from 3.43 to 3.63 eV with decreasing thickness.
Keywords
антиферромагнетики оксид никеля импульсное лазерное осаждение тонкие эпитаксиальные пленки спинтронные устройства
Date of publication
09.04.2025
Year of publication
2025
Number of purchasers
0
Views
4

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